1.The laser detection head and the sample scanning stage are integrated, the structure is very stable, and the anti-interference is strong
2.Precision probe positioning device, laser spot alignment adjustment is very easy
3.Single-axis drive sample automatically approaches the probe vertically, so that the needle tip is perpendicular to the sample scan
4.The intelligent needle feeding method of motor-controlled pressurized piezoelectric ceramic automatic detection protects the probe and the sample
5.Automatic optical positioning, no need to focus, real-time observation and positioning of the probe sample scanning area
6.Spring suspension shockproof method, simple and practical, good shockproof effect
7.Metal shielded soundproof box, built-in high-precision temperature and humidity sensor, real-time monitoring of the working environment
8.Integrated scanner nonlinear correction user editor, nanometer characterization and measurement accuracy better than 98%
Operating mode | touch mode, tap mode |
Optional mode | Friction/Lateral Force, Amplitude/Phase, Magnetic/Electrostatic Force |
force spectrum curve | F-Z force curve, RMS-Z curve |
XY scan range | 20*20um, optional 50*50um, 100*100um |
Z scan range | 2.5um, optional 5um, 10um |
Scan resolution | Horizontal 0.2nm, Vertical 0.05nm |
Sample size | Φ≤90mm, H≤20mm |
Sample stage travel | 15*15mm |
Optical observation | 4X optical objective lens/2.5um resolution |
Scan speed | 0.6Hz-30Hz |
Scan angle | 0-360° |
Operating environment | Windows XP/7/8/10 operating system |
Communication Interface | USB2.0/3.0 |
Shock-absorbing design | Spring Suspended/Metal Shielded Box |